Description:

An introduction to the theory and practice of high vacuum systems as well as thin film deposition. The physical behaviour of gases and the technology of vacuum systems including system operation and design, are studied. Applications examined include high-vacuum coating systems and gas laser tube processing, where attention will be paid to issues of gas purity and sources of contamination. Mass spectroscopy and applications in residual gas analysis will be examined, as well as leak detection techniques. Thin film deposition technologies covered include evaporation and sputtering techniques. Application of these technologies in fabricating optical coatings such as mirror, antireflective, and dielectric filter coatings will be examined. This course includes a substantial laboratory component involving the processing of gas discharge tubes (including contamination control and residual gas analysis) and the fabrication of various thin film optical elements in a class-1000 cleanroom.